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CVD diamond wires and tips for x-ray detection: growth and characterization by SEM and micro-Raman spectroscopy

机译:CVD金刚石电线和X射线检测提示:SEM和微拉曼光谱的生长和表征

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We present a systematic study of the growth of polycrystalline diamond thin films on W wires and tips by hot filament assisted chemical vapor deposition for x-ray detection purposes. We carry out correlations between scanning electron microscopy (SEM) observations and micro-Raman spectra, while varying different growth parameters. SEM observations show a uniform covering of the substrate, with growth rates ranging from 0.5 to 1.5 $mu@m/h. All $mu@-R spectra show a well defined diamond peak at 1330.8-1333.7 cm$+$MIN@1$/ together with abroad structure at 1400-1600 cm$+$MIN@1$/ and a luminescence background extending over the whole scanned range. A close analysis shows that best quality is obtained with the lowest diameter substrates, at the lowest CH$-4$/ concentration and at a low pressure. Some depositions have been studied as x-ray detectors and their sensitivity at low energy and 6 MeV beam evaluated, showing a good response with respect to standard ionization chambers.
机译:我们通过热长丝辅助化学气相沉积来提出对W线和尖端上的多晶金刚石薄膜的生长的系统研究,用于X射线检测目的。我们在扫描电子显微镜(SEM)观察和微拉曼光谱之间进行相关性,同时改变不同的生长参数。 SEM观察显示衬底的均匀覆盖,增长率范围为0.5至1.5 $ MU @ m / h。所有$ MU @ -R光谱显示一个明确的钻石峰值,1 $ + $ MIN @ 1 $ /一起与国外结构为1400-1600厘米$ + $ MIN @ 1 $ /和延伸的发光背景整个扫描范围。紧密分析表明,最低直径的基板获得最佳质量,最低的CH $ -4 $ /浓度和低压。已经研究了一些沉积作为X射线探测器,并且在低能量和6MeV光束时的灵敏度评估,相对于标准电离室表示良好的响应。

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