Novel MEMS simulation tool for thermal-based radiation sensors

机译：用于热基辐射传感器的新型MEMS仿真工具

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We report a simulation tool employing the finite element method for thermal-based radiation sensor analysis. Application of the tool to bolometric detectors is described, and simulation examples are given. Excellent agreement is observed between experimental and measured data. In addition, an equivalent circuit model, with pertinent parameters calculated automatically by the simulation tool, is also presented.

机译：我们报告了一种采用了用于热基辐射传感器分析的有限元方法的仿真工具。描述了将工具应用于钻孔探测器，并给出模拟实施例。在实验和测量数据之间观察到良好的一致性。另外，还呈现了仿真工具自动计算的相关参数的等效电路模型。

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《Symposium on Micromachining and Microfabrication》|1996年||共10页
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Nicholas R. Swart; Hubert Jerominek; Philippe Lambert;
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中图分类 TH74-53;
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4. Novel MEMS simulation tool for thermal-based radiation sensors [C] . Nicholas R. Swart, Hubert Jerominek, Philippe Lambert Symposium on Micromachining and Microfabrication . 1996

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Novel MEMS simulation tool for thermal-based radiation sensors

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