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ELECTRONICS PACKAGING TO ISOLATE MEMS SENSORS FROM THERMAL TRANSIENTS

机译:电子产品包装,将MEMS传感器与热瞬变隔离

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This paper describes a methodology for passive thermal management of a microelectromechanical system (MEMS) sensor. The MEMS sensor has a temperature rate dependence that must be minimized while the system containing the sensor experiences thermal transients from a cold power-up. A multi-step packaging concept has been developed to manage the thermal transient at the MEMS sensor. The strategy minimizes heat flow to the sensor through use of thin, high thermal resistance kovar leads and an insulating air gap between sensor and electronics. The thermal mass of the sensor assembly is increased with minimal increases in weight and volume by mounting the sensor on a high heat capacity beryllium block. Lastly, a commercial off-the-shelf (COTS) heat sink diverts as much of the heat dissipation into the ambient air as possible. This paper describes the practical implementation of these concepts. This includes the soldering of the leads to the board, the mounting of the component onto the block, and the positioning of the block relative to the frame. This paper also presents a lumped parameter thermal analysis of the packaging. The analysis predicted a maximum dT/dt of 0.4K/minute where dT/dt is the temporal derivative of the MEMS sensor temperature. Test data validating the model is also presented.
机译:本文介绍了微机电系统(MEMS)传感器的被动热管理的方法。 MEMS传感器具有温度依赖性,该温度依赖性必须最小化,而包含传感器的系统经历热瞬态的热瞬变。已经开发了一种多步骤包装概念来管理MEMS传感器的热瞬态。该策略通过使用薄的高热电阻Kovar引线和传感器和电子器件之间的绝缘气隙最小化传感器的热流。通过将传感器安装在高热量的铍块上,传感器组件的热质量随着重量和体积的最小增加而增加。最后,散热器的商业废水沉积物尽可能多地散热到环境空气中。本文介绍了这些概念的实际实现。这包括导向板的焊接到板,将部件安装到块上,以及块相对于框架的定位。本文还呈现了包装的总体参数热分析。分析预测了0.4K /分钟的最大DT / DT,其中DT / DT是MEMS传感器温度的时间衍生物。还提出了验证模型的测试数据。

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