Novel process for the fabrication of top-drive double stator micromotor on glass

摘要

A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top-drive devices by use of usual surface micromachining of polysilicon LPCVD layers.