Microfluidic Technology Using SU8 on Top of PCBs

摘要

The usage of standard PCBs (Printed Circuit Boards) for the creation of micro fluidic systems was already reported. The combination of a standard micro technology using photolithography and photo sensitive layers and the PCB technology leads to interesting low cost solutions for micro systems. Using PCBs as the substrate the integration of electronics is simple and the substrate is available at low cost. Putting the sophisticated SU8 based micro technology using photolithography on top, new systems can be created. Both technologies deliver their best, in the PCB technology integrated electrodes and electronics can be created while the SU8 technology adds high resolution high aspect-ratio micro systems which are not possible in a PCB implementation. Although this combination seems to be straight forward, several issues have to overcome for a successful realization. These are the surface roughness, adhesion problems and the uniform coating of rectangular substrates. As successful examples an electro-osmotic pump and an electrochemical DNA sensor will be presented.