Design, Analysis and Implementation of Quarter-wave Absorber Structure for Uncooled Infrared Detectors with High Fill Factor

摘要

This study presents design, analysis, optimization, and fabrication of umbrella structures as an efficient quarter wave absorber within the Long Wave Infrared (LWIR) range for uncooled IR detectors. Both the effect of the ni-chrome (NiCr) layer and effect of varying pixel pitch sizes on the IR absorption performance of the umbrella structures are examined. An average of 96% absorption is measured for the optimized case within the LWIRrange.