MOEMS for near field optical microscopy: from conception to fabrication process challenges

摘要

We explain and detail how the specifications of the concerned Scanning Near Field Optical Microscope (SNOM) MOEMS probe determine its structure and fabrication process specifications. The probe consists of a cantilever with a pyramidal tip and a waveguide coupled to a miniature photodetector, the set being integrated on an SU8 chip. The steps of the batch fabrication process are described. The fabricated probes are used as AFM/SNOM sensor allowing the acquisition of both topographic and optical images. We show images obtained on a standard sample. Mechanical characteristics of the fabricated probes are also given.