Photo-electronic Properties of Titanium Dioxide Nano Thin Films

摘要

In this study, nano-titanium films of different thickness were deposited. By adjusting it is found that when the thickness of the titanium films was in the nano-scale, the electric resistivity of the titanium films decreased. Furthermore, the deposited titanium was transformed into titanium oxide by maintain an oxygen atmosphere and using a rapid annealing furnace during sputtering. When oxidized nano titanium film is sputtered on a low-electric-resistive metal thin film, the photo-electronic properties of Nano-thin film will be enhanced.