Investigation of a Piezoelectric Driven MEMS Mirror based on Single S-shaped PZT Actuator

摘要

A silicon micromirror driven by a single S-shaped piezoelectric actuator has been demonstrated for 2-D scanning mirror applications. A large mirror (1.65mm x 2mm) and an S-shaped PZT actuator are formed after the fabrication process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 1V_(pp) are ±7.26° and ±1.18° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27Hz and 70Hz) into one signal to be used to actuate the mirror.