N,N- and O,N- coordinated Co(II) β - diketonate derivatives: synthesis, structures, thermal properties and MOCVD application

摘要

The syntheses of new volatile Co(II) complexes, namely, Co(N'acN'ac)_2, Co(N'acac)_2, Co(Nacac)_2, Co(pda)(hfac)_2 and Co(pda)(thmd)_2 were performed. On the basis of structural data of the complexes under investigation, the features of molecule packing in crystals and intermolecular contacts are considered. The obtained complexes were identified by different physico-chemical methods. The thermal behavior of cobalt complexes in the solid state were investigated by TG/DTA. Both Co(N'acN'ac) and Co(pda)(hfac)2 were used as MOCVD precursors. Films deposited on Si (100) substrates were characterized by XRD and SEM.