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Comparative Study of Random Telegraph Noise in Junctionless and Inversion-Mode MuGFETs

机译:无连接和反转模式Mugfet中随机电报噪声的比较研究

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Random telegraph-signal noise (RTN) is observed in n-channel junctionless metal-oxide-silicon field effect transistors (MOSFETs) and n-channel inversion-mode MOSFETs fabricated in the same technological process on UNIBOND SOI wafers as a function of gate and drain voltages and measurement temperature. It is shown that the RTN of the drain current in the JL transistor operating in linear mode begins to appear when the transistor starts to form an accumulation channel and has considerable lower amplitude than in the IM MOSFET. On the basis of analysis of the average charge capture and emission time of the charge from the traps responsible for the RTN the main parameters of the traps are determined.
机译:在N沟道连接金属 - 氧化物 - 氧化硅场效应晶体管(MOSFET)中观察到随机电报信号噪声(RTN)和在UNIBOND SOI晶片上的相同技术过程中制造的N沟道反转模式MOSFET,作为门的函数和排水电压和测量温度。结果表明,当晶体管开始形成累积通道时,以线性模式操作的JL晶体管中的漏极电流的RTN开始出现并且具有比在IM MOSFET中相当较低的较低幅度。基于对负责RTN负责的陷阱的平均电荷捕获和电荷发射时间的分析,确定了陷阱的主要参数。

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