Meso-scale simulation of the polymer dynamics in the formationprocess of line-edge roughness

摘要

We studied the formation process of the line edge using meso scale simulations based on the dissipative particledynamics method. The simulation model of the lithographic process is developed in which the dynamics of a polymerchain can be observed. We perform three kinds of simulations; 1) whole area exposure simulation, 2) line patternsimulation, 3) the simulation including the line edge. From our results, a sharp and a homogeneous interface betweensoluble and insoluble polymers is best solution to LER problem, although its roughness is the size of the chain dimension.The roughened edge can be found in the case of a wide and a homogeneous interface. These results indicate that oursimulations can be applicable to study the LER problem and the dynamics of polymer chain will be one of the importantorigins of LER.