Capacitive micromachined ultrasonic transducers with novel membrane design

摘要

This paper presents a novel membrane design for capacitive micromachined ultrasonic transducers (cMUTs). The proposed design is composed of a thick membrane with reinforcing beams supported by a circumferential thin membrane to improve transducer sensitivity without degrading the membrane resonance frequency. Analytical formulation of sensitivity for the proposed design was newly derived and its validity was verified by finite element analysis (FEA). From the analysis, we confirmed that this thick membrane structure achieved three times higher sensitivity compared to the conventional design by decreasing 70% of the mass of the thick membrane part with keeping the resonance frequency same.