SWNT GROWTH BY LPCVD ON FERRITIN-BASED IRON CATALYST NANOPARTICLES TOWARDS CNT SENSORS

摘要

We investigated the growth of individual single-walled carbon nanotubes (SWNTs) by low pressure chemical vapor deposition (LPCVD) on Ferritin-based Fe catalyst. According to Ferritin adsorption measurements, we show that the SWNT density on the surface can be controlled by the Ferritin concentration in the adsorption solution. The grown SWNTs were contacted by Cr/Au layers, structured by electron beam lithography and lift-off, resulting in carbon nanotube (CNT) based field effect transistors (FET).