SWNT growth by CVD on Ferritin-based iron catalyst nanoparticles towards CNT sensors

摘要

We investigated the growth of individual single-walled carbon nanotubes (SWNTs) by chemical vapor deposition (CVD) on Ferritin-based Fe catalyst. According to Ferritin adsorption measurements by atomic force microscope (AFM) imaging, we show that the SWNT density on the surface can be controlled by the Ferritin concentration in the adsorption solution, which is important for SWNT integration and avoiding SWNT bundle formation. The grown SWNTs were contacted by Cr/Au layers, structured by electron beam lithography and lift-off, resulting in carbon nanotubes (CNT) based field effect transistors (FET).