Integration of a MEMS Capacitive Sensor in a Wireless Transmitter

摘要

The integration of multiple functionality in MEMS devices is explored in this paper. The goal of this approach is to maximize the integration level by simplifying the global system architecture. In this paper, a capacitive pressure sensor is also designed as a RF capacitor for radio telemetry. The experimental results validate this novel approach that opens new alternatives to single-device RF-sensor designs.