MEMS-Based Inkjet Drop Generators from Plastic Substrates

摘要

We report fabrication of a functional inkjet drop generator from plastic substrates exclusively using MEMS-based processing steps. Polyimide and poly(ethylene naphthalate) sheets laminated to a silicon carrier wafer are investigated as the drop generator substrate, and the MEMS processing methods used and associated challenges are discussed in detail. Successful generation of drops in a 600 npi array as small as 2.4 pL in volume (16.5 μm in diameter) at drop velocities of 15.5 m/s is realized with these devices.