High-frequency (>100MHz) PZT thick film transducers and Kerfless arrays

摘要

This paper presents the latest development of high-frequency (>100MHz) PZT film ultrasonic transducers and kerfless arrays. PZT thick films of 12 ??m in thickness were fabricated with a spin-coating method. The films were found to have a remanent polarization of 33 ??C/cm2 and a coercive field Ec of 70 kV/cm. High-frequency (120MHz) single element transducers and a kerfless array were successfully fabricated with these films. The transducer and array have ??6dB bandwidth of 40% without matching, and 60% with a layer of parylene as the matching layer. The single element transducer was found to have an axial resolution of 20??m and lateral resolution of 100??m. Ultrasonic images of a porcine eye were also successfully acquired with the single element transducer. Kerfless array imaging is onging.