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Study on Crystal Quality of RF Magnetron Sputtered Si{sub}(1-x)Ge{sub}x Films for Thermoelectric Applications

机译：RF磁控溅射Si {Sub}（1-x）Ge×X膜热电应用晶体质量研究

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Improved polycrystalline characteristics have been demonstrated for Si{sub](1-x)Ge{sub}x thin films, which are deposited on (001) n-Si substrates by optimizing RF magnetron sputtering, annealed in high temperature environment and characterized by X-ray diffraction measurements.

机译：已经通过优化RF磁控溅射沉积在（001）N-Si基板上的Si {sub]（1-x）ge {sub} x薄膜来证明改善的多晶特征。通过在高温环境中退火并表征x - 射线衍射测量。

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《International Nano-Optoelectronics Workshop》|2007年||共2页
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Li-Chong Zhang; Bing Xiong; Yi Luo;
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中图分类 TP241-53;
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2. Effects of RF Magnetron Sputtering Deposition Power on Crystallinity and Thermoelectric Properties of Antimony Telluride and Bismuth Telluride Thin Films on Flexible Substrates [J] . Farbod Amirghasemi, Sam Kassegne Journal of Electronic Materials . 2021,第4期

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4. Study on Crystal Quality of RF Magnetron Sputtered Si{sub}(1-x)Ge{sub}x Films for Thermoelectric Applications [C] . Li-Chong Zhang, Bing Xiong, Yi Luo International Nano-Optoelectronics Workshop . 2007

机译：RF磁控溅射Si {Sub}（1-x）Ge×X膜热电应用晶体质量研究
5. In situ spectroscopic ellipsometry studies of silicon film crystallinity and interface structure deposited by DC reactive magnetron sputtering. [D] . Yang, Yonghong. 1996

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Study on Crystal Quality of RF Magnetron Sputtered Si{sub}(1-x)Ge{sub}x Films for Thermoelectric Applications

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