Non-Destructive Characterization of Metal-Semiconductor Interface by Raman Scattering

机译：拉曼散射的金属半导体界面的非破坏性表征

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摘要

Raman scattering is a very powerful tool for micro- and nano-metric scale characterization of precise device manufacturing process in nondestructive and noncontact way. As an example, this paper describes interface interactions between metallic electrodes and Si characterized by Raman scattering

机译：拉曼散射是一种非常强大的工具，用于非破坏性和非接触方式的精确器件制造过程的微型和纳米度量标准表征。例如，本文描述了金属电极和Si之间的界面相互作用，其特征是拉曼散射的特征

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《International Conference on Advanced Thermal Processing of Semiconductors》|2006年||共4页
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作者
Harima Hiroshi;
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中图分类 TN305-53;
关键词
MOSFET; Raman spectra; semiconductor device measurement; semiconductor-metal boundaries; Raman scattering; Si; device manufacturing process; interface interactions; metal-semiconductor interface; metallic electrodes; micrometric scale characterization; nanometric s;

机译：MOSFET;拉曼光谱;半导体器件测量;半导体 - 金属边界;拉曼散射;SI;器件制造过程;界面相互作用;金属半导体界面;金属电极;微米尺度表征;纳米级;

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1. Advanced characterization of electrodeposition-based high efficiency solar cells: Non-destructive Raman scattering quantitative assessment of the anion chemical composition in Cu(In,Ga)(S,Se)(2) absorbers [J] . Insignares-Cuello C., Oliva F., Neuschitzer M., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2015,第Null期

机译：基于电沉积的高效太阳能电池的高级表征：Cu（In，Ga）（S，Se）（2）吸收剂中阴离子化学成分的无损拉曼散射定量评估
2. Metal-Semiconductor Contacts Induce the Charge-Transfer Mechanism of Surface-Enhanced Raman Scattering [J] . Zhu Mao, Wei Song, Lei Chen The journal of physical chemistry, C. Nanomaterials and interfaces . 2011,第37期

机译：金属-半导体接触引起表面增强拉曼散射的电荷转移机理
3. Metal-Semiconductor Contacts Induce the Charge-Transfer Mechanism of Surface-Enhanced Raman Scattering [J] . Zhu Mao, Wei Song, Lei Chen The journal of physical chemistry, C. Nanomaterials and interfaces . 2011,第37期

机译：金属-半导体接触引起表面增强拉曼散射的电荷转移机理
4. Non-Destructive Characterization of Metal-Semiconductor Interface by Raman Scattering [C] . Harima, Hiroshi . 2006

机译：金属-半导体界面的拉曼散射无损表征
5. Characterization of polymer surfaces and interfaces using surface-enhanced Raman scattering. [D] . Hong, Pel-Pel. 1992

机译：使用表面增强拉曼散射表征聚合物表面和界面。
6. In-situ Raman spectroscopic-based microfluidic labon-a-chip platform for non-destructive and continuous characterization of Pseudomonas aeruginosa biofilms [O] . Jinsong Feng, César de la Fuente-Núñez, Michael J. Trimble, -1

机译：基于原位拉曼光谱的微流控芯片芯片平台用于铜绿假单胞菌生物膜的非破坏性和连续表征
7. Magnetic Polarons and the Metal-Semiconductor Transition in (Eu,La)B6 and EuO: Raman Scattering Studies [O] . Snow, C. S., Cooper, S. L., Young, D. P., 2001

机译：磁极化子与（Eu，La）B6中的金属半导体跃迁和EuO：拉曼散射研究
8. Non-Destructive Characterization of Polymer/Metal Interfaces Using Surface-Enhanced Raman Scattering (SERS). [R] . Boerio, F. J. 1990

机译：使用表面增强拉曼散射（sERs）的聚合物/金属界面的非破坏性表征。

Non-Destructive Characterization of Metal-Semiconductor Interface by Raman Scattering

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