(Ba_(0.6),Sr_(0.4))TiO_3 Thick Films Deposited by Aerosol Deposition Method for Multi-layered Capacitor Applications

摘要

The effect of powder annealing at elevated temperatures on the dielectric constant of (Ba_(0.6),Sr_(0.4))TiO_3 thick films deposited by aerosol deposition method has been investigated. Due to the possibility of partial control over the grain boundaries offered by aerosol deposition techniques, the electrical properties of the films have been improved by improving the quality of the powder used for deposition. A value of 200 has been obtained for (Ba_(0.6),Sr_(0.4))TiO_3 thick films deposited by aerosol deposition method using powder annealed at 900°C for 1 hour in O_2 environment. Leakage current has been reduced by an order of magnitude by annealing the powder, and a capacitance density of 1.7 nF/mm~2 has been calculated for a capacitor consisting of a single (Ba_(0.6),Sr_(0.4))TiO_3 thick film layer between electrode layers. It can be concluded that powder annealing in O_2 environment is a promising process in improving the dielectric properties of the (Ba_(0.6),Sr_(0.4))TiO_3 thick films deposited by aerosol deposition method.