PZT Thick Films for MEMS Applications by Lithographically Structured Electrophoretic Deposition

摘要

Thick-film piezoelectric transducers have been studied widely in the past years. However the limitations in fabrication obstruct the use in actuators and sensors. The alignment, the reproducibility, structure sizes and especially the ability for integration in MEMS technology are limited. This paper suggests a new approach to fabricate thick-film piezoelectric transducer arrays with photolithographic alignment and micrometer structure sizes. Electrophoretic deposition is a widely used industrial process for ceramic coating or painting. The proven abilities for mass and batch production make this process ideal for MEMS applications. The integration of electrophoretically deposited piezoelectric lead-zirconate-titanate (PZT) thick films in standard MEMS technology is demonstrated and the process is characterized.