The design and preliminary tests of a thermally-excited resonant accelerometer in micromachined silicon with piezoresistive detection are presented. The frequency response of the sensor has been measured, showing good agreement with design simulations. The structure changes its resonance frequency proportionally to the applied acceleration. The frequency shift can be tracked by means of a closed-loop oscillator, by opportunely conditioning the input-output frequency response of the resonator. The quasi-digital output of the oscillator has been measured versus static acceleration between ?g and g, leading to a shift of 35 Hz/g.
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