COATING FINE IRON PARTICLES WITH AN OXIDATION-RESISTANT γ-ALUMINA NANOLAYER USING ALD IN A FLUIDIZED BED REACTOR

摘要

Very fine (～5 μm) iron (Fe) particles are coated at 450 K with an ultrathin, conformal, pinhole-free, crystalline, γ-Al_2O_3 nanolayer that is 1-10 nm thick using Atomic Layer Deposition (ALD) in a fluidized bed reactor. The alumina nanolayer passivates individual primary iron particles that maintain their magnetic moment independent of the alumina film thickness.