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首页> 外文期刊>Journal of Materials Science >Nickel and copper deposition on fine alumina particles by using the chemical vapor deposition-circulation fluidized bed reactor technique
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Nickel and copper deposition on fine alumina particles by using the chemical vapor deposition-circulation fluidized bed reactor technique

机译:使用化学气相沉积-循环流化床反应器技术在细氧化铝颗粒上沉积镍和铜

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摘要

A Chemical Vapor Deposition-Circulation Fluidized Bed Reactor technique has been developed to deposit metallic Ni and Cu onto alumina particles of 45 μm diameter. The furnaces consisted of upper and lower zones, and the deposition precursors were produced both in situ and by vaporization of chlorides. X-ray diffraction, metallographical examination, and compositional analysis were used to analyze the deposition layers. For both Ni and Cu deposition, the deposition rates increased with higher temperatures of the lower furnace. The rates increased with greater amounts of chloride addition as well, but they reached plateaus when the amounts of addition were more than 40%.
机译:已开发出化学气相沉积-循环流化床反应器技术,以将金属Ni和Cu沉积到直径为45μm的氧化铝颗粒上。熔炉由上部和下部区域组成,沉积前体既可以原位生成,也可以通过氯化物的蒸发生成。 X射线衍射,金相检查和成分分析被用于分析沉积层。对于镍和铜的沉积,沉积速率随着下部炉子的较高温度而增加。氯化物的添加量也随着添加量的增加而增加,但是当添加量超过40%时,它们达到了平稳状态。

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