The effect of air-damping on the planar MEMS structures

摘要

Squeeze film damping of a planar micromechanical structure that oscillates in the normal direction to the substrate is investigated. Theoretical models influencing the squeeze film damping has been developed for the transversely oscillating plates. The air-film model has been derived from the modified nonlinear Reynolds equation, where the influence of the gas rarefaction is included. The finite difference method is used to solved the equation. The performance of squeeze film such as the variation of the pressure distribution and the air damping load during the whole period are analysed.