Nano-structured TiN/TiBN multilayer thin films

摘要

Nano-structured TiN/TiBN multilayer thin films were deposited onto unheated Si(100) substrates by reactive unbalanced dc-magnetron sputtering in an Ar-N{sub}2 gas mixture at a pulsed-bias voltage of -60V. The effects of the bilayer thickness (A=1.8-7.7nm) on microstructures and mechanical properties have been analyzed using X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), and microindentation measurements. Microstructure studies revealed that the TiN layers were fcc Bl-NaCl structure comprising of (111)- and (200)-oriented grains depending on A, while the TiBN layers were amorphous. Significant relationships were found between hardness (H) and A. A maximum hardness of ～30GPa was observed in a multilayer film with A=1.8nm. The possible hardness enhancement mechanism was also discussed.