A multilayer back electrode for a photovoltaic thin film solar cell, use of the multilayer back electrode for the production of thin film solar cells and modules, photovoltaic thin film solar cells and modules containing the multilayer back electrode, and a method of manufacturing photovoltaic thin film solar cells and modules

摘要

The present invention relates to a multilayer back electrode for a photovoltaic thin-film solar cell, comprising, in this order, at least one bulk back electrode layer, at least one, in particular ohmic, contact layer, obtained by applying at least one layer or essentially comprising at least one metal chalcogenide, wherein the metal of the metal chalcogenide, in particular selected from molybdenum, tungsten, tantalum, cobalt and / or niobium and that the chalcogen of the metal chalcogenide, in particular selected from selenium and / or sulfur, by physical or chemical vapor deposition using at least one Metallchalkogenidquelle or obtained by applying at least one metal layer (first layer), wherein the first layer and the bulk back electrode layer in their composition, in particular in the respectively used metal or, if more metals in the metal layer and the bulk back electrodes With regard to at least one, in particular all of these metals, disagree, containing or substantially of Mo, W, Ta, Nb and / or Co by physical vapor deposition using at least one metal source and treating this metal layer at temperatures above 300 ° C. , preferably above 350 ° C in a chalcogen, in particular selenium and / or sulfur atmosphere and / or in a Chalkogenwasserstoff-, in particular a H2S and / or H2Se atmosphere, to form a Metallchalkogenidlage (second layer). The invention furthermore relates to the use of this multilayer back electrode for the production of thin-film solar cells and thin-film solar modules, photovoltaic thin-film solar cells and modules comprising the multilayer back electrode according to the invention and to a method for producing thin-film photovoltaic solar cells and modules.