Multilayer back electrode for a photovoltaic thin-film solar cell, a method of using multilayer back electrode in the manufacture of thin-film solar cells and modules, photovoltaic thin-film solar cells and modules as well as including the multi-layer rear electrode Production method

摘要

The present invention is a multilayer back electrode for photovoltaic thin film solar cells, in the order described below, with at least one bulk back electrode layer (4) and at least one particularly ohmic contact layer 8a, 8b. And the ohmic contact layer comprises at least one layer comprising at least one metal chalcogenide or substantially consisting of at least one metal chalcogenide, physical vapor deposition or chemical vapor deposition. Provided that the metal of the metal chalcogenide is selected from molybdenum, tungsten, tantalum, cobalt and / or niobium, and the chalcogen of the metal chalcogenide is selected from selenium and / or sulfur. Or contains molybdenum, tungsten, tantalum, zirconium, niobium and / or cobalt At least one metal layer (first layer 10) consisting of them qualitatively is deposited by physical vapor deposition under the use of at least one metal source and in a chalcogen atmosphere, a metal chalcogenide layer ( To the second layer). However, the first layer and the bulk back electrode layer do not match in the metal used.