A combined diagnostics and modelling of low pressure H_2/(10%)N_2 plasmas generated in a hollow cathode (DC) reactor is present. Neutral and ion distributions are measured by mass spectrometry in the pressure range 0.8 - 8 Pa. Apart from N_2 and H_2, NH_3 is observed in appreciable concentrations among the neutrals. Concerning the charged species, pure hydrogen and nitrogen ions are detected together with mixed ones. A zero order kinetic model is used to explain the experimental results. NH_3 is formed via plasma-surface interactions and the mixed ions, through protonation reactions in the glow. According to the model calculations, the electron temperature T_e, which changes as a function of the total pressure, is an important parameter in the resulting distribution of neutrals and ions.
展开▼
