POLYIMIDE-BASED MICROFLUIDIC DEVICES WITH NANOPOROUS MEMBRANES FOR FILTRATION AND SEPARATION OF PARTICLES AND MOLECULES

摘要

The development of polyimide-based, microfluidic devices with nanoporous membranes is reported. Microchannels are fabricated from spin-on polyimide by a lamination technique. High aspect ratio nanopores are created in the polyimide channel walls by ion irradiation and subsequent ion-track etching. The devices can be used for on-chip filtration and separation of particles or as microstructures for drug delivery.