Single source MOCVD system for deposition of superconducting films onto moved tapes

摘要

A new single source MOCVD-system was developed, which can be used to coat continuously textured Nickel tapes. To test the YBCO deposition single crystals and IBAD buffered substrates were continuously transported with 4 m/h through the deposition zone. The critical current density of the superconducting layers at 77 K is higher than 4 MA/cm~2 on single crystalline LaAlO_3 and higher than 2 MA/cm~2 on IBAD buffered tapes. Two routes for the buffer layer deposition on Ni are chosen: a) NiO is epitaxially grown onto textured Ni by thermal oxidation. b) In reducing atmosphere textured buffer layers were deposited onto nickel.