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METALORGANIC CHEMICAL VAPOR DEPOSITION(MOCVD) PROCESS AND APPARATUS TO PRODUCE MULTI-LAYER HIGH-TEMPERATURE SUPERCONDUCTING(HTS) COATED TAPE
METALORGANIC CHEMICAL VAPOR DEPOSITION(MOCVD) PROCESS AND APPARATUS TO PRODUCE MULTI-LAYER HIGH-TEMPERATURE SUPERCONDUCTING(HTS) COATED TAPE
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机译:用于生产多层高温超导涂层带的金属化学气相沉积(MOCVD)工艺和装置
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摘要
An MOCVD apparatus and process for producing multi-layer HTS-coated tapes with increased current capacity which includes multiple liquid precursor sources, each having an associated pump and vaporizer, the outlets of which feed a multiple compartment showerhead apparatus within an MOCVD reactor. The multiple compartment showerhead apparatus is located in close proximity to an associated substrate heater which together define multiple deposition sectors in a deposition zone.
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