MoS_2 COMPOSITE COATINGS DEPOSITED BY CLOSED FIELD UNBALANCED MAGNETRON SPUTTER ION PLATING- Mechanical-Tribological-Structural Characterization

摘要

The MoS_2-Ti composite coatings are deposited by rotating the substrates between three MoS_2 and one titanium target in Ar plasma by dc magnetron sputtering using Teer CFUBMS equipment (UDP-550), Recently, a new developed coating MoS_2 composite coating of MoS2-Ti, which is deposited by CFUBMSIP, has been worked out. The mechanical and tribological properties of MoS_2-Ti coated composites onto different steel substrates were characterized using microhardness test, friction-wear test under atmosphere conditions. Structural analysis was pointed out using X-ray diffraction, SEM-EPMA. The coatings that are dense and showed some crystallized structure with amorphous by XRD. The properties of the coatings were improved by optimizing the deposition parameters with using Taguchi Method. MoS_2 is well known lamellar solid lubricant with its hexagonal structure. Very low friction coefficient of MoS_2 based coatings is generally associated with easy-shear planes of the lamellar structure parallel to the sliding direction. The surface chemistry due to atmospheric conditions during friction processes is of great importance in the tribological performance and mechanical properties of MoS_2 solid lubricant thin film.