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Deep UV Photodetectors Fabricated from CVD Single Crystal Diamond

机译:由CVD单晶钻石制成的深紫色光电探测器

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Deep UV detection using a single crystal diamond (SCD) substrate without a homoepitaxial layer has been demonstrated using a defect passivation treatment. Despite evidence of surface damage on the SCD, the treatments lead to highly effective photoconductive devices, displaying six-orders of discrimination between deep UV and visible light and a responsivity as high as 100A/W, equivalent to an external quantum efficiency of 700, similar to the best values for devices based on high quality homoepitaxial layers. Impedance spectroscopic investigations suggest that the treatment used reduces the impact of less resistive surface material, most likely defects left from substrate polishing.
机译:使用缺陷钝化处理已经证明了使用没有主页层的单晶金刚石(SCD)衬底的深紫外线检测。尽管对SCD的表面损坏有证据,但该处理导致高效的光电导器,在深紫色和可见光之间显示六个偏差,以及高达100A / W的响应度,相当于700的外部量子效率,相似基于高质量的主页层的设备的最佳值。阻抗光谱研究表明,使用的处理降低了较低电阻表面材料的影响,很可能留在基板抛光中的缺陷。

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