PRODUCTION PROCESS FOR LARGE AREA CVD DIAMOND SINGLE CRYSTAL AND LARGE AREA CVD DIAMOND SINGLE CRYSTAL OBTAINED BY THE PROCESS

摘要

PROBLEM TO BE SOLVED: To provide a high quality CVD diamond single crystal having a large area and no depressions, and a production process for obtaining the same.;SOLUTION: The process comprises arranging not less than 4 diamond single crystal substrates having the principal plane of {100} with their {100} sides adjacent to each other, growing diamond on the principal planes of the arranged single crystal substrates by means of gas phase synthesis and removing the single crystal substrates to obtain a piece of a large area CVD diamond single crystal. Given unit A consists of two optionally selected adjacent single crystal substrates: A1 and A2, and unit B consists of the two other adjacent single crystal substrates: B1 and B2 in the four adjacent single crystal substrates. The diamond single crystal substrates are arranged in a way that the surfaces of the opposite sides of A and B are each on the same plane and the surface central to the distance between the sides where A1 and A2 are faced and the surface central to the distance between the sides where B1 and B2 are faced are shifted in the direction of the surface where the unit A faces the unit B.;COPYRIGHT: (C)2012,JPO&INPIT