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Physical effects of evaporated materials in Thin Films and Emission Patterns

机译:薄膜和发射图案中蒸发材料的物理效应

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The present work studies the refraction index and physical thickness variation of deposited thin films over large glass substrates (r ≈20 cms.) and source emission patterns variation, exclusively due to the type of material in the evaporation process at high vacuum. The employed method consists in varying the evaporated material and so obtaining the thin films physical thickness and refraction index in several points over the substrate through adjustment of the measured transmittance, comparing with the one obtained by simulation. The results show a radial distribution of the refraction index and physical thickness in dielectric thin films due to the material employed.
机译:本作研究在大型玻璃基板(R≈20CMS中)和源发射图案的沉积薄膜的折射率和物理厚度变化以及源发射图案的变化,其仅是由于高真空蒸发过程中的材料类型。所用方法包括改变蒸发的材料,因此通过调节测量的透射率,从基板上的几个点中获得薄膜物理厚度和折射率,与通过模拟所获得的透射率相比。结果表明,由于所用材料,介电薄膜中的折射率和物理厚度的径向分布。

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