METHOD FOR FORMING PATTERN, METHOD FOR FORMING INTERCONNECTION PATTERN, ELECTRICAL OPTICAL DEVICE AND ELECTRONIC INSTRUMENT TO EVAPORATE OR ANALYZE THIN FILM OF DESIRED REGION AND PATTERN THIN FILM

摘要

PURPOSE: A method for forming a pattern is provided to evaporate or analyze a thin film of a desired region and pattern a thin film by installing a sublimation material on or in a base member. CONSTITUTION: A thin film(2) is formed on a base member(1) including a sublimation material. Light is irradiated to the base member. The sublimation material in a desired region is sublimed by the heat generated by the irradiation of the light. The thin film corresponding to the irradiation region is eliminated to pattern the thin film.