Planar TEM analysis of nanoindented samples using the focused ion beam lift-out technique

摘要

The focused ion beam system (FIB) has become a valuable tool for the preparation of transmission electron microscope (TEM) samples. Several FIB preparation techniques exist but of particular interest is the lift-out technique, which allows for the extraction of a thin membrane from a bulk material. This technique has seen great success in the preparation of cross sectional samples. We explore the use of this technique for planar sample preparation to examine grain deformation due to nanoindentation in a reference copper material.