LASER INTERNAL MODIFICATION PLUS WET ETCHING FOR MICRO-STRUCTURING CRYSTALLINE AND GLASSY MATERIALS

摘要

The development of fs laser technology has enabled the internal modification of transparent solid materials, performed by focusing femtosecond (fs) pulses. Using internal modification and subsequent wet etching, micrometer-scale removal processing with arbitrary three-dimensional design was enabled. We applied this technique to transparent nonphotosensitive crystalline and glassy materials. This is a unique processing technique almost impossible by other techniques.