Addition of di-nitrogen to the feed gas has been shown to greatly influence growth rates and morphology of the deposited layer in various diamond CVD techniques. In this paper, several hypotheses for these phenomena, as presented in literature, are tested for the case of oxy-acetylene diamond CVD. For this purpose, simulation models for hydrodynamics and combustion chemistry are extended with detailed models for nitrogen chemistry. Based on the simulation results, several proposed hypotheses can be ruled out as possible explanations for the observed phenomena.
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