Many workers have given much attention on c-BN and BCN coatings because of their prominent hardness as well as oxidation resistance at high temperature. In order to do clear the reason why c-BN and BCN coating induce crack occurrence after deposition, we have compared the difference of behavior among c-BN, ternary B-C-N and multilayer of graded BN/cBN. The hardness and oxidation resistance of films at high temperatures were investigated. The films were prepared by the ion beam sputtering method and crystal structure was investigated by FT-IR and ESCA. Also nanoindentation test was carried out. Moreover the thermal behavior at high temperatures up to 1073K was studied in ambient air.
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