FAROS-Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

摘要

In this paper, we describe the beneficial combination of a new fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We will describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system.