Fabrication of the X-ray Condenser Zone Plate KZP 7

摘要

The condenser zone plate KZP7 is used not only in the Gottingen X-ray microscope at BESSY in Berlin, but also in the X-ray microscopes at ALS in Berkeley, USA, and at ISA in Aarhus, Danmark. The zone plate interference patten of KZP7 is generated with uv laser light using an optical system with two aspheric mirrors. The zone plate pattern is recoded in photoresist. To obtain optimum contrast an optically matched layer system is used. It reduces backreflection to the photoresist layer. The photoresist pattern is transferred into germanium by an trilevel reactive ion etching process.