Long-wavelength metal-semiconductor-metal photodetectors with transparent and opaque electrodes

摘要

In this paper, we present a comparative study of transparent and opaque electrode InAlAs/InGaAs metal-semiconductor-metal photodiodes (MSMPDs) for operation at 1.31 and 1.55 $mu@m. The transparent materials are indium-tin-oxide (ITO) and cadmium-tin-oxide (CTO) and the opaque material is Ti-Au. The rf magnetron sputtered films of ITO and CTO, deposited at a substrate temperature of 300 degrees C, exhibited as-deposited resistivities of 5.6$DOT@10$+$MIN@3$/ approximately ega$DOT@cm and 1.0$DOT@10$+$MIN@3$/ approximately ega$DOT@cm, respectively. The resistivity of the ITO and CTO films dropped to 1.1$DOT@10$+$MIN@3$/ approximately ega$DOT@cm and 5.2$DOT@10$+$MIN@4$/ approximately ega$DOT@cm, respectively, after a 4 minute 400 degree C anneal in an N$-2$/ ambient. The interdigitated ITO and CTO electrodes were made by etching in a methane:hydrogen (1 to 3) plasma. The responsivity of 1 $mu@m finger by 1 $mu@m spacing (1 by 1 $mu@m), 50 $MUL 50 $mu@m$+2$/ active area, MSMPDs was 0.40 A/W for the Ti-Au, 0.66 A/W for the CTO, and 0.69 A/W for the ITO MSMPDs. The Ti-Au, CTO and ITO MSMPDs had 3- dB cut-off frequencies of 14.0 GHz, 7.5 GHz, and 5.0 GHz, respectively, from time-domain measurements performed at 1.3 $mu@m and 11.26 GHz, 4.00 GHz, and 2.61 GHz, respectively, from frequency-domain measurements performed at 1.55 $mu@m. Discrepencies between the 3-dB cut-off frequency obtained from the time-domain and the frequency-domain measurements are attributed to the time-domain measurement system's inability to accurately resolve low frequency behavior (below 2 GHz) and space charge effects.