The Improvement of Characteristic of The Photoreceptor a-C:H/a-Se/Al

摘要

The major problems of the a-C:H/a-Se/Al photoreceptor manufactured by PECVD method are poor adhesion, lower hardness and lower wear-resistance of a-C:H film. The reasons for above shortcomings were analyzed in this paper in detail. The improvements of the technologies and depositing conditions of a-C:H film were performed. The new a-C:H/a-Sc/Al photoreceptor possessed good adhesion, higher hardness and wear-resistance was manufactured, and its electrophotographic characteristic were unchanged.