Improved vibration sensitivity of the all quartz package surface acoustic wave resonator

摘要

By exploiting the unique nature of the all-quartz-package (AQP) surface-acoustic-wave resonator (SAWR), the magnitude of the three-dimensional vibration sensitivity, mod r/sub 3D/ mod , of the devices is reduced to below 3*10/sup -10//g. By altering the geometry of the glass frit which forms the seal between the SAW substrate and matching quartz cover, the vibration sensitivity can be significantly reduced. By fabricating two matched SAWR devices on opposite sides of the same substrate and connecting them in parallel, the vibration sensitivity can be further reduced, even with nonideal mounting support structures. These steps have resulted in the lowest values ever reported for all three vibration axes.