陶瓷封装对石英晶体谐振器的仿真研究

摘要

Based on the three-dimensional theory of piezoelectricity, the quartz crystal resonator with consideration of package structures have been investigated by the finite element software ANSYS. With adding conductive adhesive support, sealing base and cover, the paper obtained clear cloud pictures of displacement of the thickness-shear vibrations of quartz crystal plate and displacement pictures on the length and width direction. Numerical results showed that compared with free vibration, the effect of sealing base and cover on the thickness-shear vibration of quartz crystal plate is little. In the paper, the obtained results have verified efficiency of Mindlin plate theory on analysis of high frequency vibration of quartz crystal plate.%基于三维压电理论，利用有限元软件ANSYS对考虑封装结构的石英晶体谐振器进行了研究。在添加导电胶、封装基座和封盖后，获得了清晰的石英晶体板厚度剪切振动的位移云图和在长度、宽度方向的位移图。数值分析结果表明与自由振动相比，封装基座和封盖对石英晶体板厚度剪切振动的影响不大。结果验证了Mindlin板理论在分析石英晶体板高频振动的有效性。