Compensation of the stress dependence of flexible integrated capacitive pressure sensors for biomedical applications

摘要

This paper presents a compensation method for the stress dependence of flexible integrated capacitive pressure sensors. Without compensation the differentiation between changes in the sensor signal due to pressure or bending cannot be made [1]. To achieve this requirement a complex back side structuring of thinned capacitive pressure sensors is conducted in preparation for simulations and pressure sensor measurements. With this back side structuring the bending stress can be constrained to regions without pressure sensitivity. This work compares simulation results with structured and unstructured capacitive pressure sensors in different bending states and shows the effectivity of the introduced compensation structures.