NOVEL FLEXIBLE POLYMER BASED MULTI-LAYERED SENSOR FOR PRESSURE, DISPLACEMENT AND BIOMEDICAL SENSING APPLICATIONS

摘要

ABSTRACT According to the present disclosure, the conductivity of the PDMS films were varied by incorporating metals including nickel, tin, copper, CNT in varying weight ratio. This enabled us to develop polymers with varying conductivity and also piezoelectric behavior. The same was used to develop a novel multilayered electrode for sensor applications. The system consisted of about 7 layers. Poly Di-Methyl Siloxane (PDMS) layer of thickness arranging from 20 to 30 mm was grown using spin coating. Then two layers of metal namely titanium and gold with thickness varying from 50 to 100 nms were deposited using Physical Vapor deposition systems on the PDMS layer. Then the optimized conducting PDMS layer with appropriate metal dopants was grown over the gold layer. On the initial substrate side, two layers of tetrahedral amorphous carbon (10 to 25 nm) by an ion beam assisted technique and a thicker about 1micron Diamond like Carbon (DLC) were grown using a Plasma CVD process.